Ultra-dynamic linear units /
compound tables with Eitzenberger air bearings and integrated linear motor

High acceleration rate (>100 m/s²),
designed for high-speed applications requiring smooth running 

Linear Axis with iron less linear motor

• High precision constant movement
• Completely with measurement system and end shifts
• Highly valuable emergency running performance

Compound table with air bearings,
linear motor and low-profile prism guide

• High dynamic performance

Compound table with air bearings and linear motor

• Movement directly on base plate
• Ultra-high dynamic performance and
• Ultra-high accuracy

XY Open Frame Air Bearing Stage

EZ-0333 is an air bearing XY open frame linear stage with two times two linear motors in a gantry set up. The stage is dedicated for high dynamic high accuracy open frame applications. It is entirely contact free and requires no maintenance. The air bearings are coated with an effective dry running coating and thus are very fail save. All materials and surfaces are clean room suitable.