Available as standard module, or tailored to suit your requirements.
For applications requiring extreme speed, high accuracy and smooth running properties.
Miniature air bearing spindle for semiconductor technology
For die bonders (part) with double vacuum channel and tool fixation.
diameter of the cylindrical bearing:8 mm
tool head: ceramic
max. radial carrying capacity (centre): 26 N
High-speed air bearing spindle
EZ-040 SP22
max. radial carrying capacity (centre): 210 N
revolutions per minute: 70.000 rev/min
Special air bearing spindle with very low radial run out error
EZ-0192